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2.X,Y杌搁噸寰�(f霉)鎬э細+-5 micron over 50mm
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5.Y杌哥殑鎵垮彈鍔涳細100kg
6.X杌哥殑鎵垮彈鍔� 锛�5kg
7.Z杌歌绋嬶細65mm
8.Z杌哥簿搴︼紙鏁村€�(g猫)琛岀▼锛夛細+-10 micron
9.Z杌哥簿搴︼紙2mm琛岀▼鍏�(n猫i)锛夛細+-2 micron
10.Z杌稿京(f霉)浣嶇簿搴︼細+-1 micron锛堝湪25 micron琛岀▼鍏�(n猫i)鐢�250g娓�(c猫)瑭︽ā绲勬脯(c猫)瑭︼級
11.Z杌稿垎杈ㄧ巼锛�+-0.125 micron
12.Z杌哥殑閫熷害锛�7mm/second
13.Z杌哥殑娓�(c猫)瑭﹂€熷害 锛�5mm/second
14.Z杌哥殑鎵垮彈鍔涳細10kg pull at 5mm/second
15.澶惧叿宸ヤ綔鑼冨湇锛�X 220mm/Y 220mm/Z 50mm
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3.閴ら嚌锛�2鍙�(姣忚嚭(t谩i))
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